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TGXYZ02

AFM XYZ calibration grating, 100nm step height, 5µm and 10µm pitch arrays
新皋企業 NANOSENSORS PPP-NCR AFM 原子力顯微鏡探針

  • AFM calibration standard of the TGXYZ series for precise X, Y, and Z-axis calibration.

  • Features versions of the same calibration standard 20nm (TGXYZ01) and 500nm (TGXYZ03) step heights.

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Structure Specifications

Structure Type
Pitch
Step Height
Accuracy
Edge Radii
Arrays of circular/square pillars and holes, as well as lines
5 µm / 10 µm
~100 nm
N/A
N/A

Chip Dimensions

Active Area
Chip Dimensions
Material / Coating
1×1 mm / 500×500 µm
5 × 5 mm
Silicon

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