TGX

Silicon calibration grating featuring an array of square holes with sharp undercut edges.
Formed by anisotropic etching along the (111) crystallographic planes of silicon.

Step height is an approximate value, NOT for vertical calibration purposes.

Structure Type	Pitch	Step Height	Accuracy	Edge Radii
Array of square holes	3 µm	~ 1 µm	< 5 nm	N/A

Active Area	Chip Dimensions	Material / Coating
1 × 1 mm	5 × 5 × 0.3 mm	Silicon