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TGF11
AFM grating with trapezoid structures anisotropically etched in silicon
Features one-dimensional arrays of trapezoidal steps etched into a silicon substrate.
Smooth planar sidewalls formed by the (111) crystallographic planes in monocrystalline silicon.
The sidewalls and horizontal top surfaces form a precise angle of 54.74°.
Step height (1.75 µm) is an approximate value, NOT for vertical calibration purposes.
Structure Specifications
Structure Type | Pitch | Step Height | Accuracy | Edge Radii |
|---|---|---|---|---|
1D arrays of trapezoidal steps | 10 µm | ~ 1.75 µm | 0.1 µm | N/A |
Chip Dimensions
Active Area | Chip Dimensions | Material / Coating |
|---|---|---|
3 × 3 mm | 5 × 5 × 0.3 mm | Monocrystalline silicon |
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