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KPFM & EFM Sample
Sample with Al and Au line arrays for KPFM and EFM tests
Sample for KPFM and EFM tests featuring arrays with alternating Aluminum (Al) and Gold (Au) lines.
Deposited on an oxide-covered silicon substrate.
Features large, medium, and small line groups with thin copper wires connected to the Al and Au contact pads.
Mounted on a 15 mm glass disc - metal disc stack to isolate electrical signals.
Structure Specifications
Structure Type | Pitch | Step Height | Accuracy | Edge Radii |
|---|---|---|---|---|
Alternating Al and Au lines array | 8 µm / 20 µm / 40 µm | 35 nm | N/A | N/A |
Chip Dimensions
Active Area | Chip Dimensions | Material / Coating |
|---|---|---|
4 × 2 mm | 5 × 5 × 0.8 mm | Aluminum and Gold |
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