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HS-100MG
Height Calibration Standard with 100nm Step Height
Structure Specifications
Structure Type | Pitch | Step Height | Accuracy | Edge Radii |
|---|---|---|---|---|
Silicon dioxide structure arrays | 10 µm / 5 µm | ~100 nm | N/A | N/A |
Chip Dimensions
Active Area | Chip Dimensions | Material / Coating |
|---|---|---|
1×1mm / 500×500µm | 5 × 5 mm | Silicon dioxide |
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