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CS-20NG
XYZ Calibration Nanogrid with 20nm Step Height and 500nm Period
Structure Specifications
Structure Type | Pitch | Step Height | Accuracy | Edge Radii |
|---|---|---|---|---|
Silicon dioxide structure arrays | 10 µm / 5 µm / 500 nm | ~20 nm | N/A | N/A |
Chip Dimensions
Active Area | Chip Dimensions | Material / Coating |
|---|---|---|
1×1mm / 500×500µm / 100×100µm | 5 × 5 mm | Silicon dioxide |

