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2D200
Lateral-(XY)-Calibration Grating available from the NANOSENSORS
Structure Specifications
Structure Type | Pitch | Step Height | Accuracy | Edge Radii |
|---|---|---|---|---|
Inverted Pyramids | 200 nm | N/A | ±0.01% | N/A |
Chip Dimensions
Active Area | Chip Dimensions | Material / Coating |
|---|---|---|
100 x 100 µm² | 5 x 7 mm² | Silicon |
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