The XY-auto-alignment AFM probes for Non-Contact / Soft Tapping mode application with a Reflective coating extend the plug-and-fit alignment concept of the Alignment Chip (ALIGN) to 150µm short AFM cantilevers optimized for non-contact / soft tapping mode applications. AFM probe exchange with an AFM tip repositioning accuracy of better than ± 8 µm is possible for all AFM probes of the XY-alignment AFM probes series - independent of their AFM cantilever length. This series is adjusted to the tip position of AFM probes with an AFM cantilever length of 225 µm.