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AR10T-NCHR

NANOSENSORS™ High Aspect Ratio Silicon AFM probes
新皋企業 NANOSENSORS PPP-NCR AFM 原子力顯微鏡探針

NANOSENSORS™ AR10T-NCHR AFM tips are designed for non-contact mode or tapping mode AFM. This AFM probe type combines high operation stability with outstanding sensitivity and fast scanning ability.

For measurements on samples with sidewall angles approaching 90° NANOSENSORS™ produces specially tailored AFM tips. These AFM tips are FIB (Focused Ion Beam) milled to achieve a high aspect ratio portion better than 10:1 at the end of the common silicon AFM tip. This subtractive method of producing the high aspect ratio needle offers the advantage of high lateral stiffness and rigidity of the AFM tip.

On the model AR10T the last 1.5 µm of the AFM tip are tilted 13° to the center axis of the AFM cantilever. With this feature the tilt angle of the AFM cantilever caused by the mount of the AFM head (commonly 13°) will be compensated. Now, nearly vertical sidewalls can be measured offering a symmetrical scan.

AFM Tip

Height
Half Cone Angle
Radius
10-15 [µm]
< 2.8°
<10 [nm]

AFM Cantilever

Force Constant 
Resonance Frequency
Length 
42 [N/m]
330 [kHz]
125 [µm]

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